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来源：百度知道 编辑：UC知道 时间：2024/05/21 22:26:22
A Methodology for Process Design Simulators of MEMS
Based on VRML and JAVA
The paper presents an efficient way to produce
pedagogical, fully interactive and animated 3D process
design simulators for MEMS. The aim of such simulators
is to make the student learn the logical suite of process
design steps that have to be taken to produce correct
MEMS. By means of VRML, the learner can visualize the
studied MEMS device at any stage of its fabrication from
any angle. The associated Java program checks that the
actions performed by the student are done in the right
order with respect to time.
Keywords
Interactive Computer Based Learning Environment,
MEMS, Process Design, Java, VRML, Pedagogical
Simulation
Introduction
Courses on the design and production of MEMS
devices are now available worldwide [l], and teaching
MEMS technology must keep pace. In 2000, the Swiss
Foundation for Research in Mi
Based on VRML and JAVA
The paper presents an efficient way to produce
pedagogical, fully interactive and animated 3D process
design simulators for MEMS. The aim of such simulators
is to make the student learn the logical suite of process
design steps that have to be taken to produce correct
MEMS. By means of VRML, the learner can visualize the
studied MEMS device at any stage of its fabrication from
any angle. The associated Java program checks that the
actions performed by the student are done in the right
order with respect to time.
Keywords
Interactive Computer Based Learning Environment,
MEMS, Process Design, Java, VRML, Pedagogical
Simulation
Introduction
Courses on the design and production of MEMS
devices are now available worldwide [l], and teaching
MEMS technology must keep pace. In 2000, the Swiss
Foundation for Research in Mi
MEMS工艺流程设计模拟器的方法学根据VRML，并且JAVA本文提出一个高效率的方式生产师范，充分地交互式和生气蓬勃的3D工艺流程设计模拟器为MEMS。 目标的这样模拟器将使学生学会的工艺流程设计步骤逻辑随员必须采取生产正确MEMS。 通过VRML，学习者能形象化被学习的MEMS设备在它的制造任何个阶段从所有角度。 行动由学生进行的伴生的Java程序检查按正确的顺序完成关于时间。 主题词交互式基于计算机学习环境、MEMS、工艺流程设计、Java、VRML、师范模仿介绍MEMS设备的路线在设计和生产现在可利用全世界[l]，并且教的MEMS技术必须保留步幅。 2000年，瑞士基础为对Microtechnology (FSRM)的研究生产了科技目前进步水平CD-ROM (< Microsystems世界)> [2]，那描述几钥匙MEMS与同样五点模板(描述，怎么它运作，制造，应用和经济)。 软件，写在闪光，是为教MEMS技术的一个伟大的工具。 不幸地，这路线和多媒体物质缺乏互动。 图画和图片根本上是第2静止，并且不可能回报3D赋予生命的结构以巨大准确性。 方法学和例子在本文提出了是企图创造FSRM MEMS的真正的3D交互式版本和增加工艺流程设计的学习者的空间表示法。例子奔跑在所有互联网浏览器之下与Cosmo球员插入式和由学生是用途广泛在一条毕业生路线期间在微电子学和新的设计过程技术。