UC知道高手帮帮忙英文摘要啊！跪求了！！！
来源：百度知道 编辑：UC知道 时间：2024/06/04 15:16:02
微硅加速度计是一种典型的微机电系统（Micro Electro Mechanical Systems 简称MEMS）器件和一种重要的力学传感器，它是最早受到研究的微机械惯性传感器之一，广泛应用于工业自动控制、汽车及其它车辆、振动及地震测试、科学测量、军事和空间系统等方面。本文综述了微硅加速度计的发展概况，叙述了微硅加速度计的基本原理以及国内外常见的各种微硅加速度计的结构形式，包括压阻式、电容式、隧道式等，分析了这些传感器的基本特点，总结出它们在传感器性能方面存在的一些问题，预测微加速度计的发展趋势。
The micro silicon accelerometer is a kind of typical Micro Electro Mechanical system ( MEMS)component and an important mechanics sensor. it is one of the earliest researched mechanical inertial sensors.which widely applies to the industry automatic control, the automobile and other vehicles, the vibration and the earthquake tests, and so onscientific measurement, military and space systems,and so on. This article summarizes the general developmentof the micro silicon accelerometer ,and narrates the micro silicon accelerometer basic principle as well as the domestic and foreign common each kind of micro siliconaccelerometer structural style, including presses -like, the electriccapacity type, the tunnel type and so on. It has analyzed the fundamental features of thesesensors essential , concludes the questions which exists in the sensor performance ,and forecasts the development tendency of the microaccelerometer .
这些是我参考了在线翻译后整理的，语言的结构基本已经是对的了，至于专业的名词，你还要再具体检查一下，有问题再问我，可以站内联系