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来源：百度知道 编辑：UC知道 时间：2024/05/28 02:42:06
7.2.3 Examples of Multilayer Structures Prepared by Sputtering
Multilayer films with structurally and/or compositionally modulated architectures have
attracted much attention recently. The high interface volume fraction, the large intrinsic
stress, and the compositional and/or structural gradient in these architectures may lead to
some unique and enhanced electric, dielectric, magnetic, and mechanic properties. To
accomplish such a multilayer architecture, one can modulate the microstructure of each
layer by controlling the deposition temperature, whereas the composition of each layer
can be modulated by changing the sputter gas during deposition and/or switching the
targets. There are many multilayer architectures such as metal/metal, ceramic/ceramic,
and metal/ceramic prepared by sputtering techniques. The following just shows three
examples.
Multilayer films with structurally and/or compositionally modulated architectures have
attracted much attention recently. The high interface volume fraction, the large intrinsic
stress, and the compositional and/or structural gradient in these architectures may lead to
some unique and enhanced electric, dielectric, magnetic, and mechanic properties. To
accomplish such a multilayer architecture, one can modulate the microstructure of each
layer by controlling the deposition temperature, whereas the composition of each layer
can be modulated by changing the sputter gas during deposition and/or switching the
targets. There are many multilayer architectures such as metal/metal, ceramic/ceramic,
and metal/ceramic prepared by sputtering techniques. The following just shows three
examples.
7.2.3的例子，多层结构编写的溅射
多层膜结构和/或成分调制结构有
备受关注最近。高级界面体积分数，大的内在
压力，成分和/或结构梯度在这些架构可能会导致
一些独特的和加强电力，介电，磁，力学性能。至
完成这样一个多层建筑，一可以调节的微观结构，每个
层，通过控制沉积温度，而组成的每一层
可调制，通过改变溅射气体在沉积和/或切换
目标。有很多多层体系中，如金属/金属，陶瓷/陶瓷，
和金属/陶瓷编写的溅射技术。以下只是表明3
的例子。