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来源：百度知道 编辑：UC知道 时间：2024/06/15 04:19:08
7.3.2 Deposition of Nano-Scale Metal Oxide Thin Films
Metal oxides exhibit such versatile properties as high temperature superconductivity,
ferroelectricity, colossal magnetoresistivity, and non-linear optical properties. They are
recognized as possible candidates for next generation electronic materials due to their
diverse properties. The holy grail of oxide electronics research is monolithically
integrated devices composed of epitaxially grown oxide nanostructures with outstanding
performances that Si-based semiconducting devices would not be able to achieve. With
that goal in mind, one would need to control the growth of metal oxide films down to the
atomic scale similar to that achieved in semiconductors and to be able to fabricate nanoscale
heterostructures.
Metal oxides exhibit such versatile properties as high temperature superconductivity,
ferroelectricity, colossal magnetoresistivity, and non-linear optical properties. They are
recognized as possible candidates for next generation electronic materials due to their
diverse properties. The holy grail of oxide electronics research is monolithically
integrated devices composed of epitaxially grown oxide nanostructures with outstanding
performances that Si-based semiconducting devices would not be able to achieve. With
that goal in mind, one would need to control the growth of metal oxide films down to the
atomic scale similar to that achieved in semiconductors and to be able to fabricate nanoscale
heterostructures.
7.3.2沉积纳米级金属氧化物薄膜
金属氧化物展览等多功能的性能，作为高温超导电性，
铁电性，庞大的磁电阻，和非线性光学性质。他们是
作为公认的候选人有可能为下一代电子材料由于其
不同的属性。圣杯氧化氮电子研究是单片
集成器件组成的外延氧化物纳米结构，以优秀的
表演Si基半导体设备将无法实现。带有
这一目标在心目中，一将需要控制的增长，金属氧化物薄膜的到
原子尺度相似，即取得了在半导体和能制造纳米
异质结构。