UC知道一段专业英语，请高手翻译下
来源：百度知道 编辑：UC知道 时间：2024/05/28 14:04:54
The successful use of diamond films in MEMS and silicon on
diamond (SOD) structures requires that the thickness and film
stress be tailored to the specific application. This has been shown
to be possible by controlling the deposition parameters and by
using a deposition systemwith exceptionally uniformenergy input
and temperature uniformity. In addition, we have highlighted some previously unreported growth characteristics of diamond films
where film stress changes from compressive to tensile in a
predictable fashion with both temperature and thickness. Quan-
titative verification of some of the results and full mathematical
comparison of the composite structures and free standing films
remains to be done but the general trends presented here are valid
and useful for engineering viable MEMS and SOD structures.
4 .结论
成功地利用微机电系统和硅以及金刚石（超氧化物歧化酶）的结构需要按着金刚石薄膜要求厚度和应力进行针对性的研究。这项技术通过控制工艺参数，并用沉积系统具备统一的能源输入和温度均匀已
The successful use of diamond films in MEMS and silicon on diamond (SOD) structures requires that the thickness and film stress be tailored to the specific application. This has been shown to be possible by controlling the deposition parameters and by using a deposition system with exceptionally uniform energy input and temperature uniformity.
在微机电系统和硅金刚石（ SOD ）结构方面成功地使用金刚石薄膜，需要其厚度和薄膜应力适合特殊的要求。通过控制处置参数，和使用具有及其一致的能源输入和温度均衡的处置系统，这个已被证明是可能的。
In addition, we have highlighted some previously unreported growth characteristics of diamond films where film stress changes from compressive to tensile in a predictable fashion with both temperature and thickness.
此外，我们还着重指出了一些以往从未报道过的金刚石薄膜的生长特性，在该条件下，薄膜在一个可预测的温度和厚度的模式下应力从压力变化为拉力。
Quan-titative verification of some of the results and full mathematical comparison of the composite structures and free standing films remains to be done but the general trends presented here are valid and useful for engineering viable