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7.3.2.3 In situ Characterization of the Growth of Metal Oxide Films
Different methods have been used to evaluate the film growth and thickness during the
deposition. RHEED oscillations during thin film growth have been the most popular
diagnostic method to monitor the growth of metal oxide films. In this application, the
intensity of the specularly reflected electron beam is monitored. If the angle of the
incident beam to the surface is set so that there will be interference of electrons reflected
from surfaces differing in height by one unit-cell layer, oscillation in the density of
surface steps will cause oscillations in the intensity of specular reflection. For example,
the observation of RHEED oscillation pattern in the growth of YBCO film indicates that
the film grows two dimensionally with a thickness of one unit-cell, two-dimensional
nucleation on the terraces and subsequent coalescence of the islands (Terashima, et al.,
19
Different methods have been used to evaluate the film growth and thickness during the
deposition. RHEED oscillations during thin film growth have been the most popular
diagnostic method to monitor the growth of metal oxide films. In this application, the
intensity of the specularly reflected electron beam is monitored. If the angle of the
incident beam to the surface is set so that there will be interference of electrons reflected
from surfaces differing in height by one unit-cell layer, oscillation in the density of
surface steps will cause oscillations in the intensity of specular reflection. For example,
the observation of RHEED oscillation pattern in the growth of YBCO film indicates that
the film grows two dimensionally with a thickness of one unit-cell, two-dimensional
nucleation on the terraces and subsequent coalescence of the islands (Terashima, et al.,
19
7.3.2.3在原位表征的增长，金属氧化物薄膜
不同的方法，已被用来评估薄膜生长和厚度在
沉积。中RHEED振荡，在薄膜生长，一直是最热门
诊断方法，以监察的增长，金属氧化物薄膜。在这方面的应用，
强度的specularly反映了电子束进行监测。如果角度的
事件束表面是一套，所以会有干扰的电子反映
从表面不同的高度由一个单位-细胞层，振荡的密度
表面步骤，将导致振荡的强度镜面反射。举例来说，
观察中RHEED振荡的格局，增长YBCO结构的电影表明，
电影长大的两个尺寸与厚度的一组细胞，两维
核对梯田和随后的聚结的岛屿（寺，等人，
1990年;卡尔等人， 1992年） 。该中RHEED振荡亦已观察期间
增长，其他金属氧化物薄膜，如钛酸锶（金，等人， 1999年;西川，等人，
1997年）和lanio3 （陈等人， 1999年） 。